The Micro System Analyzer is the premier measurement tool for the analysis and visualization of structural vibrations and surface topography in micro structures such as MEMS. By fully integrating a microscope with scanning laser doppler vibrometry, stroboscopic video microscopy and scanning white light interferometry, the Micro System Analyzer is designed with an all-in-one combination of technologies that clarifies real microstructural response and topography.

Polytec’s Award-Winning Micro System Analyzer
Incorporated in the MEMS design and test cycle, the MSA-500 provides precise 3-D dynamic and static response data that simplifies troubleshooting, enhances and shortens design cycles, improves yield and performance, and reduces product cost.
This outstanding degree of innovation has been recognized by two prestigious awards: the 2005 Sensor Innovation Award and the Photonics Circle of Excellence for the development of microscope-based scanning vibrometry.

Superior Dynamic Characterization Compared to Single Technology Solutions
The combination of two complementary measurement techniques for investigating the vibrational behavior of small structures provides superior performance. For example, it can quickly identify, visualize and measure system resonances and transient responses, enhancing overall measurement productivity. This improved efficiency is especially important when integrating the measurement system into automated processes for MEMS production environments. Single-technology solutions like ESPI, white light interferometry, and phase-shifting interferometry give a much more limited view of small structure response.

Finds All Mechanical Resonances Without Prior Information
Using wide-band excitation, the highly sensitive laser-Doppler technique can rapidly find all mechanical resonances (in-plane and out-of-plane) without prior information. In a second step, stroboscopic video microscopy is used to obtain accurate amplitude and phase information of in-plane resonances identified through laser vibrometry.

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