The Next Step in 300 mm Probing
In step with the ITRS roadmap at 45nm and below, the Elite 300 overcomes measurement challenges brought on by increased device complexity, smaller pad sizes, and lower voltages.
The Elite 300 delivers unprecedented stepping accuracy and wafer planarity over the full temperature range.
It also provides the world's lowest-noise "Quiet" environment, and ensures low-leakage, low-capacitance measurements.
Velox™ probe station control software
• Intuitive GUI for efficient system utilization by novice and expert users
• Software joystick for precise, sub-micron positioning
• Improved sub-die navigation with CellView
• Easy integration with instrument, testers, and test and measurement software for fast data collection
Powerful automation tools for data collection
• Automatic wafer alignment
• Auto XYZ and theta correction for sub-micron stepping
• Automatic die size measurement tool